Plasma Diagnostics and Applications
연구주제 · Electrical and Electronic Engineering
논문 (피인용 순)
| 연도 | 논문 | 학부 저자 | 피인용 |
|---|---|---|---|
| 2023 | Improvement of Plasma Etching Endpoint Detection With Data-Driven Wavelength Selection and Gaussian Mixture Model IEEE Transactions on Semiconductor Manufacturing | 이종민 | 10 |
| 2024 | Plasma Etching Endpoint Detection in the Presence of Chamber Variations Through Nonlinear Manifold Learning and Density-Based Clustering IEEE Transactions on Semiconductor Manufacturing | 이종민 | 5 |
| 2019 | Auto-Masked Surface Texturing of Kerf-Loss Free Silicon Wafers Using Hexafluoroisopropanol in a Capacitively Coupled Plasma Etching System ECS Journal of Solid State Science and Technology | 김지현 | 4 |
| 2025 | Adaptive learning strategies for addressing chamber variations in real-time endpoint detection of semiconductor plasma etching Journal of Intelligent Manufacturing | 이종민 | 1 |
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Adaptive learning strategies for addressing chamber variations in real · Improvement of Plasma Etching Endpoint Detection With Data-Driven Wave · Plasma Etching Endpoint Detection in the Presence of Chamber Variation · Auto-Masked Surface Texturing of Kerf-Loss Free Silicon Wafers Using H